Improved reflector for process chamber

A processing system comprising:

• a process chamber comprising:
• a chamber body disposed around a process volume;
• a substrate support in the process volume;
• a reflector positioned over or below the substrate support, the reflector comprising:
• a base;
• and
• a reflective assembly including a first plurality of reflective portions and a second plurality of reflective portions, wherein
• each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is connected to the base, and
• each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is configured to be individually disconnected from the base;
• and
• a spare reflective portion configured to replace a first reflective portion in the first plurality of reflective portions or the second plurality of reflective portions.

A processing system comprising:

• a process chamber comprising:
• a chamber body disposed around a process volume;
• a substrate support in the process volume;
• a plurality of lamps;
• a reflector positioned over or below the substrate support, the reflector comprising:
• a base;
• and
• a reflective assembly including a first plurality of reflective portions and a second plurality of reflective portions, wherein
• the plurality of lamps are positioned between the substrate support and the reflector,
• each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is connected to the base, and
• each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is configured to be individually disconnected from the base;
• and
• a spare reflective portion configured to replace a first reflective portion in the first plurality of reflective portions or the second plurality of reflective portions, wherein
• the spare reflective portion has a reflective surface configured to face one of the lamps when the spare reflective portion is coupled to the base, and
• the reflective surface on the spare reflective portion has a different radius of curvature, a different size, or a different coating than corresponding reflective surface on the first reflective portion.