Spray Pyrolysis of Li-Salt Films
AssigneeMassachusetts Institute of Technology
InventorsJennifer Lilia Rupp, Yuntong Zhu, Lingping Kong, Moran Balaish
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Abstract
A method for making a lithium salt film includes heating a substrate, spraying a mixture with a spray nozzle onto the substrate to form a precursor film, and annealing the precursor film to form the lithium salt film. The lithium salt film has a thickness of about 400 nm to about 100 pm. The spray mixture includes a first precursor comprising a lithium ion, a second precursor comprising an anion, and a solvent.
Claims20
A method for making a lithium salt film, the method comprising:
- heating a substrate;
- while heating, spraying a mixture onto the substrate to form a precursor film, the mixture comprising:
- a first precursor comprising a lithium ion;
- a second precursor comprising an anion;
- and
- a solvent;
- and
- annealing the precursor film to form the lithium salt film having a thickness of about 400 nm to about 100 μm;
- wherein:
- the lithium salt film comprises the lithium ion and the anion;
- and
- while annealing, the precursor film has a temperature of 100° C. to 800° C.
A method for making a lithium sulfate film, the method comprising:
- spraying a mixture onto a substrate having a temperature of about 180° C. to 220° C. to form a precursor film, the mixture comprising:
- lithium acetate,
- ammonium sulfate, and
- water;
- and
- annealing the precursor film to form the lithium sulfate film having a thickness of about 1 μm to about 10 μm;
- wherein, while annealing, the precursor film has a temperature of 400° C. to 700° C.
A lithium salt film deposition system comprising:
- a spray pyrolysis apparatus comprising:
- a precursor solution comprising lithium acetate and ammonium sulfate;
- a spray nozzle to create a spray mist of the precursor solution;
- a substrate positioned so as to be contacted by at least a portion of the spray mist;
- and
- a first heating source configured to heat the substrate;
- and
- a post-annealing apparatus comprising:
- a chamber;
- a second heating source thermally coupled to the chamber and configured to heat the substrate so that the substrate has a temperature of 100° C. to 800° C.
Dependencies are inferred from the claim text.