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US 2025/0026962 A1Published application
Composition for etching and manufacturing method of semiconductor device using the same
AssigneeSoulbrain Co., Ltd.
InventorsJae-Wan PARK, Jung-Hun LIM, Jin-Uk LEE
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Abstract
The present invention relates to a composition for etching, comprising a first inorganic acid, a first additive represented by Chemical Formula 1, and a solvent. The composition for etching is a high-selectivity composition that can selectively remove a nitride film while minimizing the etch rate of an oxide film, and which does not have problems such as particle generation, which adversely affect the device characteristics.
Claims8
A composition for etching, comprising,
- a first inorganic acid,
- a first additive represented by Chemical Formula 1,
- an ammonium-based compound at a proportion of 0.01% to 20% by weight with respect to the total amount of the composition for etching, and
- a solvent.
- (In Chemical Formula 1, X is O or N,
- R1 to R6 are each, independently, selected from the group consisting of hydrogen, a C1-C20 alkyl group, a C1-C20 alkoxy group, a C2-C20 alkenyl group, a C3-C20 cycloalkyl group, a C1-C20 aminoalkyl group, a C6-C20 aryl group, a C1-C20 alkyl carbonyl group, a C1-C20 alkyl carbonyloxy group, and a C1-C10 cyano alkyl group, and n11 is 0 or 1.)
3 more elements
Dependencies are inferred from the claim text.