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US 2025/0026631 A1Published application
Mems element and piezoelectric acoustic device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHiroshi MATSUBARA, Shinsuke IKEUCHI, Ryosuke NIWA, Gou SAITOU
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Abstract
A MEMS device is provided that includes a piezoelectric element including a piezoelectric membrane including a ferroelectric and configured to vibrate based on an application of a voltage. A device may include a diode portion electrically connected in parallel to the piezoelectric element and including a diode.
Claims20
A MEMS element comprising:
- a piezoelectric element including a piezoelectric membrane having a ferroelectric and configured to vibrate based on an application of a voltage;
- and
- a diode portion electrically connected in parallel to the piezoelectric element and including a diode.
A piezoelectric acoustic device comprising:
- a MEMS element comprising:
- a piezoelectric element including a piezoelectric membrane including a ferroelectric and configured to vibrate based on an application of a voltage;
- and
- a diode portion electrically connected in parallel to the piezoelectric element and including a diode.
1 more element
A method of manufacturing a MEMS element comprising:
- providing a piezoelectric element including a piezoelectric membrane including a ferroelectric and configured to vibrate based on an application of a voltage;
- and
- electrically connecting a diode portion in parallel to the piezoelectric element and including a diode.
Dependencies are inferred from the claim text.