Transport system, processing system, method for manufacturing article, and motor
AssigneeCanon Kabushiki Kaisha
InventorTakeshi Yamamoto
Life of this patent
Estimating the term…
Abstract
A transport system includes: a mover that includes at least one magnetic body; a stator that includes a plurality of coils arranged in a first direction to be able to face the at least one magnetic body and applies force to the at least one magnetic body by the plurality of coils to which current is applied; and a control unit that controls the current applied to the plurality of coils to apply the force to the at least one magnetic body in the first direction, a second direction crossing the first direction, and a third direction crossing the first direction and the second directions.
Claims18
A transport system comprising:
- a mover that includes at least one magnetic body;
- a stator that includes a plurality of coils arranged in a first direction to be able to face the at least one magnetic body and applies force to the at least one magnetic body by the plurality of coils to which current is applied;
- and
- a control unit that controls the current applied to the plurality of coils to apply the force to the at least one magnetic body,
- wherein the at least one magnetic body includes at least two permanent magnets that are magnetized in different directions from each other, the at least two permanent magnets being stacked in a second direction that is a direction in which the magnetic body and the coil face each other.
-20. (canceled)
A motor comprising:
- a first portion that includes at least one magnetic body;
- and
- a second portion that includes a plurality of coils and applies force to the at least one magnetic body by the plurality of coils to which current is applied,
- a control unit that controls the current applied to the plurality of coils to apply the force to the at least one magnetic body,
- wherein the first portion or the second portion is configured to be rotatable with a rotation axis as a center,
- wherein the at least one magnetic body is arranged in a first direction that is a circumferential direction with the rotation axis as a center, and
- wherein the plurality of coils are arranged so as to face the at least one magnetic body,
- wherein the at least one magnetic body includes at least two permanent magnets that are magnetized in different directions from each other, the at least two permanent magnets being stacked in a second direction that is a direction in which the magnetic body and the coil face each other.
A mover comprising at least one magnet body,
- wherein the at least one magnet body faces a plurality of coils included in a stator, the plurality of coils being arranged in a first direction, and force is applied to the at least one magnet body by a current applied to the plurality of coils, and
- wherein the at least one magnetic body includes at least two permanent magnets which are magnetized in different directions from each other, the at least two permanent magnets being stacked in a second direction that is a direction in which the magnetic body and the coil face each other.
Dependencies are inferred from the claim text.