Device, method, and system for transforming measurement data

A method of transforming measurement data, the method comprising:

• receiving first measurement data, the first measurement data including a plurality of step height values, wherein the plurality of step height values are optically measured in units of a target region on a first semiconductor chip on which a chemical mechanical polishing (CMP) process is performed;
• receiving layout data, the layout data including a layout in the first semiconductor chip;
• generating density data, the density data including an image to which layout density is applied, the layout density indicating a ratio of area occupied by the layout in a unit resolution region;
• and
• predicting, based on an artificial intelligence model and from the density data and the first measurement data, second measurement data, the second measurement data including a step height value per target region of a second semiconductor chip, the second semiconductor chip comprising the first semiconductor chip and a metal deposited on the first semiconductor chip.

A system comprising:

• an optical measurement device configured to generate first measurement data, the first measurement data including a plurality of step height values in units of a target region on a first semiconductor chip by optically measuring the first semiconductor chip on which a chemical mechanical polishing (CMP) process is performed;
• a database configured to store layout data, the layout data including a layout in the first semiconductor chip;
• and
• a measurement data transformation device configured to
• generate, based on the layout data, density data, and
• transform, based on the first measurement data, the density data, and an artificial intelligence model, the first measurement data to second measurement data, the second measurement data including a plurality of step height values of a second semiconductor chip, the second semiconductor chip comprising the first semiconductor chip and a metal deposited on the first semiconductor chip.