Laser processing device and laser processing method

2:

• The laser processing device according to claim 1,
• wherein the second groove overlaps an end portion of the first groove in the width direction of the first groove.

3:

• The laser processing device according to claim 2,
• wherein the branching pattern branches the laser light into one or more third branched laser light components to form a third groove in addition to the first branched laser light and the second branched laser light, the third groove overlapping an end portion of the second groove in the width direction of the second groove.

4:

• The laser processing device according to claim 1,
• wherein the distance between the position of the focusing point of the first branched laser light and the position of the focusing point of the second branched laser light adjacent to each other in the direction along the line is larger than a pulse pitch of the laser light.

5:

• The laser processing device according to claim 1,
• wherein a distance between positions of focusing points of the plurality of first branched laser light components in the direction along the line is larger than a pulse pitch of the laser light.

6:

• The laser processing device according to claim 1,
• wherein a distance between positions of focusing points of the plurality of first branched laser light components in the direction along the line is smaller than the distance between the position of the focusing point of the first branched laser light and the position of the focusing point of the second branched laser light adjacent to each other in the direction along the line.

7:

• The laser processing device according to claim 1,
• wherein a distance between positions of focusing points of the plurality of second branched laser light components in the direction along the line is larger than a pulse pitch of the laser light.

8:

• The laser processing device according to claim 1,
• wherein a distance between positions of focusing points of the plurality of second branched laser light components in the direction along the line is smaller than the distance between the position of the focusing point of the first branched laser light and the position of the focusing point of the second branched laser light adjacent to each other in the direction along the line.

9:

• The laser processing device according to claim 1,
• wherein the branching pattern branches the laser light into the two first branched laser light components and the two second branched laser light components.

10:

• The laser processing device according to claim 1,
• wherein the branching pattern branches the laser light into the three first branched laser light components and the three second branched laser light components.

11:

• The laser processing device according to claim 1,
• wherein the branching pattern branches the laser light so that focusing points are aligned in a one-dimensional array along the line.