Laser processing apparatus

A laser processing apparatus comprising:

• a holding unit configured to hold a workpiece;
• a laser oscillator configured to generate a laser beam to be condensed and applied to the workpiece held by the holding unit;
• an indexing feed unit configured to move the holding unit holding the workpiece in a Y-direction relative to a condensing point of the laser beam;
• and
• a scanning unit configured to scan the laser beam emitted from the laser oscillator, over the workpiece held by the holding unit, in an X-direction orthogonal to the Y-direction,
• the scanning unit including
• a scanner configured to scan the laser beam emitted from the laser oscillator, in the X-direction,
• a first lens that the laser beam from the scanner enters and is configured to have, in the X-direction, a curvature that makes the laser beam perpendicular to the workpiece held by the holding unit, and
• a second lens configured to have, in the Y-direction, a curvature that causes the laser beam emitted from the first lens to be condensed in the Y-direction, and
• a length in the X-direction of each of the first lens and the second lens being set equal to or more than a length in the X-direction of the workpiece held by the holding unit.