Environmental cell and electron microscope

Abstract

In liquid environment observation or gas environment observation using an environmental cell, highly accurate measurement is possible without being affected by deflection of a membrane. A environmental cell for holding a sample to be observed by an electron microscope includes: a first chip including a first membrane and a frame supporting the first membrane and having a first opening portion; a second chip including a second membrane and a frame supporting the second membrane and having a second opening portion; and a sample holding member. The first chip and the second chip are disposed such that the first membrane and the second membrane face each other and the first opening portion and the second opening portion overlap each other in a top view. The sample holding member is disposed on the second membrane in a manner of straddling a contour of the second opening portion in the top view. The sample is attached to a region located in the second opening portion in the top view of the sample holding member.

Dependencies are inferred from the claim text.