Apparatus and method for manipulating a microscopic sample
AssigneeFEI Company
InventorJoseph M. Lebow
Life of this patent
Estimating the term…
Abstract
A sample manipulation system for a sample to be used in a charged particle beam process. The sample manipulation system includes a carrier defining a passageway, a wire slidably supported and at least partially housed by the carrier, and a feed mechanism. The wire is configured to slide through the passageway. The wire includes a supported portion and a protruding portion. The supported portion is disposed in the passageway and the protruding portion extends from the carrier for engaging the sample. The feed mechanism is configured to drive the wire through the passageway to control a length of the protruding portion.
Claims20
A sample manipulation system for a sample to be used in a charged particle beam process, the sample manipulation system comprising:
- a carrier defining a passageway;
- a wire slidably supported and at least partially housed by the carrier, the wire configured to slide through the passageway, the wire including a supported portion and a protruding portion, wherein the supported portion is disposed in the passageway and the protruding portion extends from the carrier for engaging the sample;
- and
- a feed mechanism configured to drive the wire through the passageway to control a length of the protruding portion.
A charged particle microscope, comprising:
- a sample holder for holding a sample;
- a sample manipulation system comprising:
- a carrier defining a passageway;
- a wire slidably supported and at least partially housed by the carrier, the wire including a supported portion and a protruding portion, wherein the supported portion is disposed in the passageway and the protruding portion extends from the carrier for engaging the sample;
- and
- a feed mechanism including a first actuator configured to drive the wire along the passageway;
- a second actuator coupled to the sample manipulation system;
- at least one detector;
- and
- a controller including a processor and a non-transitory memory for storing computer readable instructions, by executing the instructions in the processor, the charged particle microscope is configured to:
- acquire, via the detector, an image;
- adjust, via the first actuator, a length of a protruding portion of the wire from the carrier based on the acquired image;
- and
- adjust, via the second actuator, a relative position between a sample and a distal end of the wire.
Dependencies are inferred from the claim text.