Photoelectron emission microscope
AssigneeHitachi High-Tech Corporation
InventorsMomoyo ENYAMA, Akira IKEGAMI, Takeshi MORIMOTO, Yuta KAWAMOTO
Life of this patent
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Abstract
Provided is a photoelectron emission microscope that facilitates acquisition of a high-contrast photoelectron image. A photoelectron emission microscope starts irradiation of a pulsed electron beam 13 performed by an irradiation electron optical system 10 in a manner of overlapping excitation light after predetermined time has elapsed since start of irradiation of a sample 4 with excitation light 2 performed by an excitation optical system 1, and starts capturing a photoelectron image performed by a camera 6 at the time of the start of the irradiation of the pulsed electron beam performed by the irradiation electron optical system or thereafter.
Claims10
A photoelectron emission microscope comprising:
- an excitation optical system configured to irradiate a sample with excitation light;
- a camera configured to capture a photoelectron image by a photoelectron emitted from the sample irradiated with the excitation light;
- an image formation electron optical system including an objective lens configured to focus the photoelectron on a detection surface of the camera;
- an irradiation electron optical system configured to irradiate the sample with a pulsed electron beam;
- and
- a control unit, wherein
- the control unit controls to start irradiation of the pulsed electron beam performed by the irradiation electron optical system in a manner of overlapping the excitation light after predetermined time has elapsed since start of irradiation of the excitation light performed by the excitation optical system, and controls to start capturing the photoelectron image performed by the camera at the time of the start of the irradiation of the pulsed electron beam performed by the irradiation electron optical system or thereafter.
A photoelectron emission microscope comprising:
- an excitation optical system configured to irradiate a sample with excitation light;
- a camera configured to capture a photoelectron image by a photoelectron emitted from the sample irradiated with the excitation light;
- an image formation electron optical system including an objective lens configured to focus the photoelectron on a detection surface of the camera;
- an irradiation electron optical system configured to irradiate the sample with a pulsed electron beam;
- a control unit;
- and
- a GUI device, wherein
- the control unit controls to start irradiation of the pulsed electron beam performed by the irradiation electron optical system in a manner of overlapping the excitation light after predetermined time has elapsed since start of irradiation of the excitation light performed by the excitation optical system, and controls to start capturing the photoelectron image performed by the camera at the time of the start of the irradiation of the pulsed electron beam performed by the irradiation electron optical system or thereafter, and
- the GUI device displays imaging conditions of the photoelectron image together with the photoelectron image acquired by the camera, and displays a recipe setting screen on which the imaging conditions are adjusted.
Dependencies are inferred from the claim text.