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US 2025/0020534 A1Published application
Vacuum leak detector with multistage vacuum pump and integrated gas-specific gas sensor and method for producing a vacuum leak detector
AssigneeInficon GmbH
InventorsCarsten STRIETZEL, Ivan BOKANOVIC, Hjalmar BRUHNS
Life of this patent
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Abstract
A gas-specific vacuum leak detector has a multi-stage vacuum pump and a gas-specific gas sensor. The gas sensor is an integral part of the vacuum pump and is thereby adapted to detect a specific gas within the vacuum pump.
Claims10
1-9. (canceled)
A gas-specific vacuum leak detector comprising:
- a multistage vacuum pump;
- and
- a gas-specific sensor,
- wherein the gas sensor is an integral part of the vacuum pump, and
- wherein the gas sensor can detect a specific gas in the vacuum pump.
2 more elements
A method for producing a gas-specific vacuum leak detector, the method comprising:
- integrating a gas-specific gas sensor into a multistage vacuum pump so that the gas sensor is an integral part of the vacuum pump and is thereby adapted to detect a specific gas within the vacuum pump.
Dependencies are inferred from the claim text.