# US 2025/0020527 A1 · Pressure sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0020527 A1 - Document ID: US20250020527A1 - Status: Published application - Kind: A1 - Application number: 18/713,171 - Filed: 2022-11-18 - Published: 2025-01-16 - Earliest claimed: 2021-11-24 - Assignees: Beijing Naura Microelectronics Equipment Co., Ltd. - Applicants: Beijing Sevenstar Flow Co., Ltd; Beijing Naura Microelectronics Equipment Co., Ltd. - Inventors: Feng ZHANG; Lei HU - Web page: https://patentgrep.com/patent/US20250020527A1 ## CPC - G01L 9/125: {with temperature compensating means (non electric temperature compensating means G01L19/04)} - G01L 19/04: Means for compensating for effects of changes of temperature {, i.e. other than electric compensation} - G01L 9/0072: {using variations in capacitance} - G01L 19/146: {using flexible element between the transducer and the support} - G01L 19/147: {Details about the mounting of the sensor to support or covering means} - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) ## Abstract Provided is a pressure sensor, including a first pedestal (1) and an electrode member (4), the first pedestal (1) is provided with a supporting portion (11) for supporting the electrode member (4), and a plurality of adjusting members (51, 52) are stacked in sequence between two opposite surfaces of the electrode member (4) and the supporting portion (11); and thermal expansion coefficients of the electrode member (4), the plurality of adjusting members (51, 52), and the first pedestal (1) gradually increase in a direction from the electrode member (4) to the supporting portion (11). The pressure sensor can solve the problem of relative displacement of parts caused by a temperature change. ## Claims ### Claim 1 A pressure sensor, comprising a first pedestal and an electrode member, wherein the first pedestal is provided with a supporting portion for supporting the electrode member, and a plurality of adjusting members are stacked in sequence between two opposite surfaces of the electrode member and the supporting portion; and thermal expansion coefficients of the electrode member, the plurality of adjusting members, and the first pedestal gradually increase in a direction from the electrode member to the supporting portion; wherein an amount of a shear-strain deformation of each of the adjusting members during thermal expansion is increased by increasing at least one of a specified pressure, a friction coefficient, and a total thickness; the specified pressure is a pressure applied to the electrode member in the direction from the electrode member to the supporting portion; the friction coefficient comprises a first friction coefficient between one adjusting member and the electrode member, a second friction coefficient between another adjusting member and the supporting portion, and a third friction coefficient between two adjacent adjusting members; and the total thickness is a sum of thicknesses of all the adjusting members. ### Claim 2 (depends on 1) The pressure sensor of claim 1, wherein a thermal expansion coefficient of each of the adjusting members satisfies a following formula: C M = Ca + dC × M × f ( N + 1 ) where CM is a thermal expansion coefficient of an Mth adjusting member from an adjusting member closest to the electrode member, and M=1, 2, . . . , N; N is a number of the adjusting members, and is greater than or equal to 2; dC=Cc−Ca, Ca is a thermal expansion coefficient of the electrode member, and Cc is a thermal expansion coefficient of the first pedestal; f is a value within a preset range, and the preset range is larger than or equal to N/(N+1) and less than or equal to (N+2)/(N+1). ### Claim 3 (canceled) ### Claim 4 (depends on 1) The pressure sensor of claim 1, wherein the specified pressure is greater than or equal to 250N; the first friction coefficient, the second friction coefficient, and the third friction coefficient are all greater than or equal to 0.1; and the total thickness is greater than or equal to 0.4 mm. ### Claim 5 (canceled) ### Claim 6 (canceled) ### Claim 7 (depends on 1) The pressure sensor of claim 1, wherein at least one contact surface of at least one of the adjusting members is a concave-convex surface. ### Claim 8 (depends on 7) The pressure sensor of claim 7, wherein each adjusting member is annular, and concave regions and convex regions of the concave-convex surface are arranged alternately in a circumferential direction of the adjusting member. ### Claim 9 (depends on 7) The pressure sensor of claim 7, wherein two adjusting members are provided, and are respectively a first adjusting member and a second adjusting member which are disposed in sequence in the direction from the electrode member to the supporting portion, and at least one contact surface of the first adjusting member is the concave-convex surface; and both contact surfaces of the second adjusting member are flat or at least one of the contact surfaces of the second adjusting member is the concave-convex surface. ### Claim 10 (depends on 1) The pressure sensor of claim 1, wherein any two adjacent ones among the electrode member, the plurality of adjusting members, and the supporting portion are independent of each other, or connected to each other. ### Claim 11 (depends on 1) The pressure sensor of claim 1, wherein a thermal expansion coefficient of at least one of the adjusting members gradually increases in the direction from the electrode member to the supporting portion. ### Claim 12 (canceled) ### Claim 13 (canceled) ### Claim 14 (depends on 8) The pressure sensor of claim 8, wherein two adjusting members are provided, and are respectively a first adjusting member and a second adjusting member which are disposed in sequence in the direction from the electrode member to the supporting portion, and at least one contact surface of the first adjusting member is the concave-convex surface; and both contact surfaces of the second adjusting member are flat or at least one of the contact surfaces of the second adjusting member is the concave-convex surface. ### Claim 15 (depends on 2) The pressure sensor of claim 2, wherein any two adjacent ones among the electrode member, the plurality of adjusting members, and the supporting portion are independent of each other, or connected to each other. ### Claim 16 (depends on 2) The pressure sensor of claim 2, wherein a thermal expansion coefficient of at least one of the adjusting members gradually increases in the direction from the electrode member to the supporting portion. ### Claim 17 A pressure sensor, comprising a first pedestal and an electrode member, wherein the first pedestal is provided with a supporting portion for supporting the electrode member, and a plurality of adjusting members are stacked in sequence between two opposite surfaces of the electrode member and the supporting portion; and thermal expansion coefficients of the electrode member, the plurality of adjusting members, and the first pedestal gradually increase in a direction from the electrode member to the supporting portion, wherein an amount of a shear-strain deformation of each of the adjusting members during thermal expansion is increased by reducing at least one of contact area, a ratio, a shear modulus of the adjusting members, and an elastic modulus of the adjusting members; the contact area comprises first contact area of contact surfaces between one adjusting member and the electrode member, second contact area of contact surfaces between another adjusting member and the supporting portion, and third contact area of contact surfaces between two adjacent adjusting members; and each adjusting member is a ring, the ratio comprises a first ratio of the first contact area to a radial width of the ring, a second ratio of the second contact area to the radial width of the ring, and a third ratio of the third contact area to the radial width of the ring, and the radial width is a difference between an outer radius of the adjusting member and an inner radius of the adjusting member. ### Claim 18 (depends on 17) The pressure sensor of claim 17, wherein a thermal expansion coefficient of each of the adjusting members satisfies a following formula: C M = Ca + dC × M × f ( N + 1 ) where CM is a thermal expansion coefficient of an Mth adjusting member from an adjusting member closest to the electrode member, and M=1, 2, . . . , N; N is a number of the adjusting members, and is greater than or equal to 2; dC=Cc−Ca, Ca is a thermal expansion coefficient of the electrode member, and Cc is a thermal expansion coefficient of the first pedestal; f is a value within a preset range, and the preset range is larger than or equal to N/(N+1) and less than or equal to (N+2)/(N+1). ### Claim 19 (depends on 17) The pressure sensor of claim 17, wherein the first contact area, the second contact area, and the third contact area are all less than or equal to 150 mm2; the first ratio, the second ratio, and the third ratio are all less than or equal to 100 mm; the shear modulus of the adjusting members is less than or equal to 100 GPa; and the elastic modulus of the adjusting members is less than or equal to 250 GPa. ### Claim 20 (depends on 17) The pressure sensor of claim 17, wherein at least one contact surface of at least one of the adjusting members is a concave-convex surface. ### Claim 21 (depends on 20) The pressure sensor of claim 20, wherein each adjusting member is annular, and concave regions and convex regions of the concave-convex surface are arranged alternately in a circumferential direction of the adjusting member. ### Claim 22 (depends on 20) The pressure sensor of claim 20, wherein two adjusting members are provided, and are respectively a first adjusting member and a second adjusting member which are disposed in sequence in the direction from the electrode member to the supporting portion, and at least one contact surface of the first adjusting member is the concave-convex surface; and both contact surfaces of the second adjusting member are flat or at least one of the contact surfaces of the second adjusting member is the concave-convex surface. ### Claim 23 (depends on 21) The pressure sensor of claim 21, wherein two adjusting members are provided, and are respectively a first adjusting member and a second adjusting member which are disposed in sequence in the direction from the electrode member to the supporting portion, and at least one contact surface of the first adjusting member is the concave-convex surface; and both contact surfaces of the second adjusting member are flat or at least one of the contact surfaces of the second adjusting member is the concave-convex surface. ### Claim 24 (depends on 17) The pressure sensor of claim 17, wherein any two adjacent ones among the electrode member, the plurality of adjusting members, and the supporting portion are independent of each other, or connected to each other. ### Claim 25 (depends on 17) The pressure sensor of claim 17, wherein a thermal expansion coefficient of at least one of the adjusting members gradually increases in the direction from the electrode member to the supporting portion.