Method and apparatus for measuring the thickness of one or more layers of a multi-layer film
AssigneeSyncro S.R.L.
InventorMarco BRANCA
Life of this patent
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Abstract
A method is described for measuring, in a multi-layer film having one or more layers of a first and a second material, the total thickness of the first material and/or the second material. The method includes: a) acquiring, by means of an optical or an ionizing radiation sensor, a first measurement signal (Sott) representative of the total thickness of the film; b) acquiring, by means of a capacitive sensor, a second measurement signal which is the sum of the signals given by the first and second material of the film. The signal given by each material of the film is a function of the thickness of the material; and c) calculating, from the first and second signal, the total thickness of the first material and/or the second material.
Claims17
A method for measuring, in a multi-layer film (F) having one or more layers of a first material and one or more layers of a second material, the total thickness (L1) of the first material and/or the total thickness (L2) of the second material, comprising:
- a) acquiring, by means of an optical sensor or an ionizing radiation sensor, a first measurement signal (Sott) representing in an absolute manner the total thickness of the film (F);
- b) acquiring, by means of a capacitive sensor, a second measurement signal (Scap) which is the sum of the signals given by the first and second material of the film (F), wherein the signal given by each material of the film (F) is a function of the thickness (L1, L2) of that material;
- and
- c) calculating, from said first and second measurement signals (Sott, Scap), the total thickness (L1) of the first material and/or the total thickness (L2) of the second material.
An apparatus for measuring, in a multi-layer film (F) having one or more layers of a first material and one or more layers of a second material, the total thickness (L1) of the first material and/or the total thickness (L2) of the second material, comprising:
- an optical sensor or an ionizing radiation sensor for providing a first measurement signal (Sott) representing in an absolute manner the total thickness of the film (F);
- a capacitive sensor for providing a second measurement signal (Scap) which is the sum of the signals given by the first and second material of the film (F), wherein the signal given by each material of the film (F) is a function of the thickness (L1, L2) of that material;
- and
- processing means for calculating, from said first and second measurement signals (Sott, Scap), the total thickness (L1) of the first material and/or the total thickness (L2) of the second material.
Dependencies are inferred from the claim text.