Mems device and electronic device

Abstract

The embodiments of the present disclosure provide an MEMS device and an electronic device. The MEMS device includes: a base substrate; an electrode structure, which is located on the base substrate and includes a first ground electrode, a signal transmission electrode and a second ground electrode, which are sequentially arranged on the base substrate at intervals; a metal film bridge, which spans above the signal transmission electrode and forms a cavity with the signal transmission electrode, where two ends of the metal film bridge are respectively electrically connected to the first ground electrode and the second ground electrode; and a support structure, which is fixedly arranged with the metal film bridge, wherein the Young's modulus of the support structure is greater than the Young's modulus of the metal film bridge.

Dependencies are inferred from the claim text.