Laser lift-off method, method for manufacturing receptor substrate, laser lift-off apparatus, and photomask
AssigneeShin-Etsu Engineering Co., Ltd.
InventorsYoshikazu Ohtani, Hiroshi Yamaoka, Masami Kurata, Taketo Usami
Life of this patent
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Abstract
The present disclosure provides a laser lift-off method for transferring objects to be transferred from a first substrate provided with the objects to be transferred onto a second substrate by virtue of laser lift-off.
Claims17
1-25. (canceled)
A laser lift-off apparatus for transferring objects to be transferred from a first substrate provided with the objects to be transferred onto a second substrate by virtue of laser lift-off, the apparatus comprising:
- a laser oscillator;
- a stage for supporting the first substrate and the second substrate while facing each other;
- and
- a photomask provided in an optical path between the laser oscillator and the stage,
- wherein the laser oscillator, the photomask, and the stage are configured to irradiate interfaces between the objects to be transferred and the first substrate with a laser beam from the laser oscillator at once, and
- the photomask has a pattern for shaping a laser beam from the laser oscillator into such a shape that only a portion of an interface between each of the objects to be transferred and the first substrate is irradiated with the laser beam.
A photomask used in a laser lift-off method in which objects to be transferred are transferred by virtue of laser lift-off from a first substrate provided with the objects to be transferred onto a second substrate, wherein
- the photomask is configured so that an interface between each of the objects to be transferred and the first substrate is irradiated at once with a received laser beam, and
- the photomask has a pattern to shape the laser beam so that only a portion of the interface between each of the objects to be transferred and the first substrate is to be an irradiated portion.
A photomask used in a laser lift-off method in which objects to be transferred are transferred by virtue of laser lift-off from a first substrate provided with the objects to be transferred onto a second substrate, comprising:
- a first part having a pattern formed for shaping a received laser beam into a patterned shape and a first laser transmissivity;
- and
- a second part having a second laser transmissivity being lower than the first laser transmissivity.
A transferring apparatus for transferring objects to be transferred from a first substrate provided with the objects to be transferred onto a second substrate by virtue of laser, the apparatus comprising:
- a laser oscillator;
- a stage for supporting the first substrate and the second substrate while facing each other;
- and
- a photomask provided in an optical path between the laser oscillator and the stage,
- wherein the laser oscillator, the photomask, and the stage are configured to irradiate interfaces between the objects to be transferred and the first substrate with a laser beam from the laser oscillator at once, and
- the photomask has a pattern for shaping a laser beam from the laser oscillator into such a shape that only a portion of an interface between each of the objects to be transferred and the first substrate is irradiated with the laser beam.
A photomask used in a transferring method in which objects to be transferred are transferred by virtue of laser from a first substrate provided with the objects to be transferred onto a second substrate, wherein
- the photomask is configured so that an interface between each of the objects to be transferred and the first substrate is irradiated at once with a received laser beam, and
- the photomask has a pattern to shape the laser beam so that only a portion of the interface between each of the objects to be transferred and the first substrate is to be an irradiated portion.
A photomask used in a transferring method in which objects to be transferred are transferred by virtue of laser from a first substrate provided with the objects to be transferred onto a second substrate, comprising:
- a first part having a pattern formed for shaping a received laser beam into a patterned shape and a first laser transmissivity;
- and
- a second part having a second laser transmissivity being lower than the first laser transmissivity.
Dependencies are inferred from the claim text.