Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphous Silicon Nitride Thin Films and Uses Thereof
AssigneesThe Texas A&M University System, Board of Regents, The University of Texas System, UT-Battelle, LLC
InventorsVenu Varanasi, Pranesh Aswath, Megen Maginot, Nickolay V. Lavrik
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