Charged particle beam deflection device

A charged particle beam deflection device, comprising:

• a layered structure having a hollow shape where a charged particle beam passes through an interior of the layered structure and including a plurality of layers layered in a direction from the interior toward an exterior of the layered structure;
• a first coil configured to deflect the charged particle beam in a first direction different from a travel direction of the charged particle beam;
• a second coil configured to deflect the charged particle beam in a second direction different from the first direction;
• and
• a pressing portion located on an outer peripheral surface of the layered structure and configured to press the outer peripheral surface from the exterior toward the interior, wherein
• the plurality of layers includes
• a first coil support layer supporting the first coil and
• a second coil support layer supporting the second coil, and
• the layered structure includes a gap, through which a cooling solvent flows, between two adjacent layers among the plurality of layers.