Device for sensing a motion of a deflective surface
AssigneeInfineon Technologies AG
InventorDarragh Francis Corrigan
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Abstract
A device for sensing a motion of a deflectable surface includes a deflectable element having a first side beam deflectable and includes a reflective surface at a second side of the deflectable element, proposing the first side. The device includes an optical emitter for emitting an optical signal towards the reflective surface and an optical receiver for receiving a reflected optical signal from the reflective surface and for providing a reception signal based on a reflective optical signal. The device includes a control unit in communication with the optical receiver for determining information related to the motion of the deflectable element based on the reception signal.
Claims20
A device for sensing a motion of a deflectable surface, the device comprising:
- an optical emitter configured for emitting an optical signal towards a reflective surface of a deflectable element;
- an optical receiver configured for receiving a reflected optical signal from the reflective surface and for providing a reception signal based on the reflected optical signal, wherein the optical receiver comprises a plurality of receiving elements arranged for detecting a two-dimensional pattern of the reflected optical signal;
- and
- a control unit in communication with the optical receiver and configured for determining information related to the motion of the deflectable element based on the reception signal,
- wherein the optical emitter and the optical receiver are arranged on a top surface of the control unit, and wherein the optical emitter, the optical receiver, and the control unit are arranged inside a single package, wherein an upper surface of the single package comprises a diffracting structure that is unobstructed to the optical signal, and wherein the single package is configured to be affixed to the deflectable element.
A method of sensing a motion of a deflectable surface, the method comprising:
- emitting, by an optical emitter, an optical signal towards a reflective surface of a deflectable element;
- receiving, by an optical receiver, a reflected optical signal from the reflective surface;
- providing, by the optical receiver, a reception signal based on the reflected optical signal, wherein the optical receiver comprises a plurality of receiving elements arranged for detecting a two-dimensional pattern of the reflected optical signal;
- and
- determining, by a control unit in communication with the optical receiver, information related to the motion of the deflectable element based on the reception signal,
- wherein the optical emitter and the optical receiver are arranged on a top surface of the control unit, and wherein the optical emitter, the optical receiver, and the control unit are arranged inside a single package, wherein an upper surface of the single package comprises a diffracting structure that is unobstructed to the optical signal, and wherein the single package is affixed to the deflectable element.
Dependencies are inferred from the claim text.