Finger Electrostatic Chuck for High Resistance Substrate Chucking

A substrate support, comprising:

• an electrostatic chuck;
• and
• a plurality of electrodes disposed in the electrostatic chuck along a common horizontal plane of the electrostatic chuck, wherein the plurality of electrodes include a positive electrode arranged in a first pattern comprising a plurality of first arcuate bands having a plurality of first fingers extending from one or both sides of each of the first arcuate bands and a negative electrode arranged in a second pattern comprising a plurality of second arcuate bands having a plurality of second fingers extending from one or both sides of each of the second arcuate bands, wherein the plurality of first arcuate bands are arranged in an alternating pattern with the plurality of second arcuate bands, wherein the plurality of first arcuate bands are electrically connected to each other via at least one first finger extending between adjacent ones of the first arcuate bands, wherein the plurality of second arcuate bands are electrically connected to each other via at least one second finger extending between adjacent ones of the second arcuate bands, and wherein there is a gap between the first pattern and the second pattern.