High efficiency optical coupler
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-Chun Huang, Chia-Ju Yu, Stefan Rusu
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Abstract
Some embodiments relate to an optical module including a substrate; a first grating coupler overlying the substrate; and a second grating coupler overlying the first grating coupler, where the second grating coupler is configured to receive a first transverse mode of an input optical signal while passing a second transverse mode of the input optical signal to the first grating coupler, and where the first grating coupler is configured to receive the second transverse mode of the input optical signal.
Claims20
An optical module, comprising:
- a substrate;
- a first grating coupler overlying the substrate;
- and
- a second grating coupler overlying the first grating coupler, wherein the second grating coupler is configured to receive a first transverse mode of an input optical signal while passing a second transverse mode of the input optical signal to the first grating coupler, and wherein the first grating coupler is configured to receive the second transverse mode of the input optical signal.
An optical module, comprising:
- a substrate;
- a first grating coupler overlying the substrate, wherein the first grating coupler comprises a plurality of first grating lines laterally adjacent to a first tapered segment, wherein the plurality of first grating lines have a first grating period;
- and
- a second grating coupler overlying the substrate and adjacent to the first grating coupler, wherein the second grating coupler comprises a plurality of second grating lines laterally adjacent to a second tapered segment, wherein the plurality of second grating lines have a second grating period different from the first grating period, and wherein a distance between the first grating coupler and the second grating coupler is less than a length of the first grating coupler.
A method of forming an optical module, comprising:
- forming a first grating coupler precursor over a substrate;
- etching the first grating coupler precursor to form a first grating coupler with a first plurality of grating lines laterally separated by a first spacing;
- forming a first dielectric over the first grating coupler;
- forming a second grating coupler precursor over the first dielectric;
- and
- etching the second grating coupler precursor to form a second grating coupler with a second plurality of grating lines laterally separated by a second spacing, wherein the second grating coupler is directly over the first grating coupler.
Dependencies are inferred from the claim text.