Spring structure and method for manufacturing a spring structure, capacitive pressure sensor and method for manufacturing a capacitive pressure sensor

Abstract

According to an embodiment, a method for manufacturing a spring structure (glass spring structure) comprises: —providing a mold substrate and a cover substrate comprising a glass material, said mold substrate and said cover substrate being connected, wherein a surface area of the mold substrate and/or of the cover substrate is structured to form a closed (or enclosed or sealed) surrounding cavity between the cover substrate and the mold substrate, —tempering the cover substrate and the mold substrate to decrease the viscosity of the glass material of the cover substrate, and providing an overpressure in the closed surrounding cavity with respect to the ambient atmosphere, to cause, based on the decreased viscosity of the glass material of the cover substrate and the overpressure in the closed surrounding cavity with respect to the ambient atmosphere, bulging of the glass material of the cover substrate starting from the closed surrounding cavity to obtain a cover substrate provided with a surrounding glass bulge, and—(subsequently) removing the mold substrate from the cover substrate to obtain the spring structure with the surrounding glass bulge.

Dependencies are inferred from the claim text.