Suspension for Resonators and MEMS Devices
OwnerNicholas MILLER, James Howard Thomas RANSLEY +2inventors
InventorsNicholas MILLER, James Howard Thomas RANSLEY, Paul M. HAGELIN, Markus LUTZ
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Abstract
A resonator and/or MEMS device is provided with a flexible suspension mount to reduce mechanical stress and/or interference arising from other electrical components. In one illustrative embodiment, the flexible suspension mount can be configured as one or more metallic springs that provide for electrical connection as well as for specific spring and dampening coefficients. In another illustrative material, techniques can be use which change spring and/or dampening coefficients at a particular point in the manufacturing/assembly/distribution process, optionally before device characterization and/or programming.
Claims20
A device, comprising:
- a die;
- a microelectromechanical systems (MEMS) structure on the die, the MEMS structure to deflect or vibrate during operation of the device;
- at least one electrical contact to output a signal during operation of the device where the signal varies according to deflection or vibration of the MEMS structure;
- wherein the MEMS structure and the at least one electrical contact are operatively coupled by a flexible suspension mount, the flexible suspension mount having a first state and a second state, and wherein the device comprises at least one structure to cause the flexible suspension mount to selectively transition from the first state to the second state;
- and
- wherein the flexible suspension mount is such that second state and the first state have different, associated spring constants and respective, associated dampening coefficients.
The device of 18 embodied as an oscillator integrated circuit, wherein the flexible suspension mount comprises at least one metallic structure that is to carry a sensed signal that varies according to a resonant vibration of the MEMS structure.
Dependencies are inferred from the claim text.