Polishing device, polishing method, and machine part
AssigneeNHK Spring Co., Ltd.
InventorsMasahiro FUJII, Daisuke FUJINO, Yoshihito ARAKI, Naoya AIKAWA, Nobuyuki FURUGORI, Tomonori KASONO
Life of this patent
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Abstract
A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface of the object to be polished, and a second drive unit for causing the support unit to control synchronously with the first drive unit such that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.
Claims14
A polishing device comprising:
- a supporting unit supporting a polishing tool;
- a stage holding an object to be polished;
- a first drive unit moving the supporting unit and the stage relative to each other along a shape of a polished surface of the object to be polished;
- and
- a second drive unit synchronized with the first drive unit and controlling the supporting unit so that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.
A polishing method for a polishing surface on a hard anodized aluminum, the polishing method comprising:
- a first step of polishing the polishing surface with a first polishing member at a first pressing strength;
- and
- a second step of polishing the polishing surface with a second polishing member at a second pressing strength after the first step,
- wherein the first pressing strength is lower than the second pressing strength.
A machine part comprising:
- a hard anodized aluminum surface;
- and
- a polishing surface on a part of the hard anodized aluminum surface,
- wherein a waviness of the polishing surface is 0.2 μm or less and a surface roughness of the polishing surface is 0.4 μm or less.
Dependencies are inferred from the claim text.