Substrate processing system and decompression structure
AssigneeEbara Corporation
InventorTomoatsu ISHIBASHI
Life of this patent
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Abstract
A substrate processing system capable of supplying a gas-dissolved liquid having a supersaturated amount of dissolved gas without generating large bubbles in a middle of a supply line is disclosed. The substrate processing system includes a control device configured to control an operation of a bubble generation device. The control device is configured to control at least one of a pressure regulator and a boost pump so that a pressure of a gas supplied to a gas-dissolved liquid generation device is smaller than a pressure of a liquid supplied to the gas-dissolved liquid generation device.
Claims15
A substrate processing system comprising:
- a substrate processing module configured to process a substrate;
- a bubble generation device configured to generate bubbles from a gas-dissolved liquid supplied to the substrate processing module;
- and
- a control device configured to control an operation of the bubble generation device, wherein the substrate processing module comprises a supply nozzle configured to supply the gas-dissolved liquid,
- wherein the bubble generation device comprises:
- a supply line connected to the supply nozzle;
- a boost pump configured to boost a pressure of a liquid flowing through the supply line;
- a gas-dissolved liquid generation device configured to dissolve a gas in the liquid flowing through the supply line to a supersaturated state;
- a pressure regulator configured to regulate a pressure of the gas supplied to the gas-dissolved liquid generation device;
- and
- a decompression structure configured to generate ultra-fine bubbles from the gas-dissolved liquid generated by the gas-dissolved liquid generation device, and
- wherein the control device is configured to control at least one of the pressure regulator and the boost pump so that the pressure of the gas supplied to the gas-dissolved liquid generation device is smaller than the pressure of the liquid supplied to the gas-dissolved liquid generation device.
A decompression structure applicable to a bubble generation device for generating bubbles from a gas-dissolved liquid supplied to a substrate processing module, comprising:
- wherein the decompression structure has:
- a main body portion connected to a supply line through which the gas-dissolved liquid flows;
- and
- a wall portion attached to the main body portion and having an opening, and
- wherein the wall portion is made of a grounded conductive resin.
Dependencies are inferred from the claim text.