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US 2025/0006451 A1Published application
Patterned x-ray emitting target
AssigneeNova Measuring Instruments Ltd.
InventorsDavid A. REED, Bruce H. NEWCOME, Bruno W. SCHUELER
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Abstract
The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.
Claims19
An X-ray source for generating an X-ray beam, said X-ray source including:
- an electron gun that is configured to generate an electron beam;
- and
- a patterned X-ray emitting target that comprises:
- an X-ray blocking mask that comprises one or more openings;
- and
- one or more structural elements positioned below the X-ray blocking mask and comprising an X-ray generating structural element;
- the one or more structural elements comprise a top structural element;
- wherein the X-ray generating structural element is configured to (a) receive electrons of the electron beam that pass through the X-ray blocking mask, and (b) reflect, through the X-ray blocking mask, the X-ray beam.
5 more elements
An X-ray photoelectron spectroscopy (XPS) system comprising:
- an X-ray source for generating an X-ray beam;
- a sample holder positioning a sample;
- a monochromator positioned between said X-ray source and said sample holder such that said X-ray beam travels from said X-ray source to said monochromator and then to said sample holder;
- and
- a detector for collecting at least a portion of photo-electrons produced by said sample,
- wherein the X-ray source comprises an electron gun that is configured to generate an electron beam;
- and a patterned X-ray emitting target that comprises:
- an X-ray blocking mask that comprises one or more openings;
- one or more structural elements positioned below the X-ray blocking mask and comprising an X-ray generating structural element;
- the one or more structural elements comprise a top structural element;
- wherein the X-ray generating structural element is configured to (a) receive electrons of the electron beam that pass through the X-ray blocking mask, and (b) reflect, through the X-ray blocking mask, the X-ray beam.
8 more elements
Dependencies are inferred from the claim text.