Electrode Structure with Corrosion Resistance and Power Durability
AssigneeRF360 Singapore Pte. Ltd.
InventorsAnja Fenchel, Marc Konstantin Dietrich, Valentin Albrecht Weippert, Matthias Honal
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Abstract
An apparatus for filtering is disclosed that implements an electrode structure with corrosion resistance and power durability. In an example aspect, the apparatus includes an acoustic filter with a piezoelectric layer and the electrode structure. The electrode structure is formed by a metal layer comprising copper and silicon and by an adhesion layer. The adhesion layer is deposited between the metal layer and the piezoelectric layer.
Claims30
An apparatus comprising:
- an acoustic filter comprising:
- a piezoelectric layer;
- and
- an electrode structure formed by:
- a metal layer comprising copper and silicon;
- and
- an adhesion layer deposited between the metal layer and the piezoelectric layer.
A method of manufacturing an electrode structure of an acoustic filter, the method comprising:
- providing an adhesion layer;
- and
- providing a silicon layer and a copper layer on one side of the adhesion layer.
An apparatus comprising:
- an acoustic filter configured to generate a filtered signal from a radio-frequency signal, the acoustic filter comprising:
- means for producing a formed acoustic wave;
- and
- means for converting the radio-frequency signal to an acoustic wave and converting the formed acoustic wave into the filtered signal, the means for converting comprising:
- a metal layer comprising copper and silicon;
- and
- an adhesion layer deposited between the metal layer and the means for producing the formed acoustic wave.
An apparatus comprising:
- an acoustic filter comprising:
- a piezoelectric layer;
- and
- an electrode structure having a first surface that faces the piezoelectric layer and a second surface that is opposite the first surface, an axis being approximately perpendicular to the first and second surfaces, the electrode structure comprising:
- copper atoms;
- silicon atoms having, along the axis, a higher concentration proximate to the second surface compared to the first surface;
- and
- chromium atoms having, along the axis, a higher concentration proximate to the first surface compared to the second surface.
Dependencies are inferred from the claim text.