Laser apparatus, method for controlling wavelength of laser light from laser apparatus, and method for manufacturing electronic devices

A method for controlling a wavelength of laser light from a laser apparatus, the method comprising:

• outputting first continuous-wave laser light from a first semiconductor laser;
• pulsing and amplifying the first laser light and outputting first pulse laser light;
• converting a wavelength of the first pulse laser light and outputting resultant second pulse laser light;
• amplifying the second pulse laser light and outputting resultant third pulse laser light;
• measuring a wavelength of the third pulse laser light;
• periodically changing a target wavelength of the third pulse laser light;
• and
• controlling a current for changing the wavelength of the laser light from the first semiconductor laser in such a way that the wavelength of the third pulse laser light becomes the target wavelength based on a measured value of the wavelength of the third pulse laser light output at the same target wavelength.

A method for manufacturing electronic devices, the method comprising:

• generating third pulse laser light by using a laser apparatus;
• outputting the third pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the third pulse laser light in the exposure apparatus to manufacture the electronic devices,
• the laser apparatus including
• a first wavelength variable semiconductor laser configured to output first continuous-wave laser light,
• a first amplifier configured to pulse and amplify the first laser light and output first pulse laser light,
• a wavelength conversion system configured to convert a wavelength of the first pulse laser light and output resultant second pulse laser light,
• an excimer amplifier configured to amplify the second pulse laser light and output the third pulse laser light,
• a monitor module configured to measure a wavelength of the third pulse laser light, and
• a processor configured to periodically change a target wavelength of the third pulse laser light and control a current for changing the wavelength of the laser light from the first semiconductor laser in such a way that the wavelength of the third pulse laser light becomes the target wavelength based on a measured value of the wavelength of the third pulse laser light output at the same target wavelength.