Methods and systems for elemental mapping
AssigneeFEI Company
InventorsGarrett BUDNIK, Chengge JIAO, Mostafa MAAZOUZ, Suzanna OFFICER, Galen GLEDHILL, Chad RUE
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Abstract
Methods and systems for imaging a sample with a charged particle microscope comprises after scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample, scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample. A spatial distribution of multiple elements in the sample may be determined based on both the acquired X-rays and the acquired ion-induced photons.
Claims14
A light collection system for collecting light in response to a charged particle irradiation, the light collection system comprises:
- an optical fiber with a first distal end enclosed in an elongated sheath;
- and
- a lens positioned at a first distal end of the light collection system, wherein the lens is optically coupled to the optical fiber for directly collecting light emitted from a sample positioned in a vacuum chamber responsive to the charged particle irradiation, and wherein the light collection system is retractably inserted into the vacuum chamber.
Dependencies are inferred from the claim text.