Method for producing cyclic silazane compound
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMasato KAWAKAMI, Shun ICHII
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Abstract
A method for producing a cyclic silazane compound represented by general formula (2) (in the formula, R1 and R2 each independently represent a C1-10 unsubstituted monovalent hydrocarbon group, R3 represents a C1-10 monovalent hydrocarbon group optionally having an amino group or an alkoxysilyl group, and m is 0, 1, or 2) that intramolecularly cyclizes an organoxysilane compound having a secondary amino group represented by general formula (1) (in the formula, R1-R3 and m have the same meaning as indicated above) in the presence of an equivalent amount or more of a basic compound selected from organic metal compounds and organic metal amide compounds achieves a high reaction rate in a short time.
Claims3
A method for preparing a cyclic silazane compound comprising the step of subjecting an organoxysilane compound having a secondary amino group, represented by the general formula (1):
- wherein R1 and R2 are each independently a C1-C10 unsubstituted monovalent hydrocarbon group, R3 is a C1-C10 monovalent hydrocarbon group which may contain an amino or alkoxysilyl group, and m is 0, 1 or 2, to intramolecular cyclization in the presence of an equivalent or more amount of a basic compound selected from organometallic compounds and organometallic amide compounds,
- the cyclic silazane compound having the general formula (2):
- wherein R1 to R3 and m are as defined above.
A cyclic silazane compound having an alkoxysilyl group, represented by the general formula (3):
- wherein R1 and R2 are each independently a C1-C10 unsubstituted monovalent hydrocarbon group, R4 and R5 are each independently a C1-C6 unsubstituted monovalent hydrocarbon group, m is 0, 1 or 2, and n is 0, 1 or 2.
Dependencies are inferred from the claim text.