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US 2024/0424601 A1Published application
Processing apparatus, and manufacturing method of movable body
AssigneeNikon Corporation
InventorsMasayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
Life of this patent
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Abstract
A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
Claims26
A processing method comprising:
- forming a structure on an object by irradiating a surface of the object with processing light;
- measuring a position of the structure on the surface of the object;
- and
- changing an irradiation position of the processing light by using a measured result that is acquired by the measuring,
- wherein
- the changing includes controlling, based on the measured result of the position of the structure formed in a first irradiation area that has been irradiated with the processing light, the irradiation position of the processing light for processing a second irradiation area that is irradiated with the processing light.
3 more elements
A processing apparatus comprising:
- a light irradiation apparatus that forms a structure on an object by irradiating a surface of the object with processing light;
- a measurement apparatus that measures a position of the structure on the surface of the object;
- and
- a position change apparatus that changes an irradiation position of the processing light by using a measured result by the measurement apparatus,
- wherein
- the position change apparatus controls, based on the measured result of the position of the structure formed in a first irradiation area that has been irradiated with the processing light, the irradiation position of the processing light for processing a second irradiation area that is irradiated with the processing light.
3 more elements
Dependencies are inferred from the claim text.