High frequency ultrasonic transducer and method of fabrication

A method of producing an ultrasonic transducer, the method comprising the steps of:

• providing a delay line substrate material;
• providing a piezoelectric substrate material as a transducer element;
• depositing a first metal conductive layer on the delay line substrate material;
• depositing a second metal conductive layer on the piezoelectric substrate material;
• forming an atomic diffusion bond between the first metal conductive layer and the second metal conductive layer;
• patterning removal of a portion of the piezoelectric substrate material to expose at least one of the first metal conductive layer and the second metal conductive layer to allow electrical contact;
• depositing a first patterned electrode on the exposed at least one of the first metal conductive layer and the second metal conductive layer to allow external electrical connection to the exposed at least one of the first metal conductive layer and the second metal conductive layer;
• and
• depositing a second patterned electrode on the piezoelectric substrate material to form an active area of the ultrasonic transducer and to allow external electrical connection to be made.