Communication node to interface between evaluation systems and a manufacturing system
AssigneeApplied Materials, Inc.
InventorsMichael Howells, Thorsten Kril, Hemanth Konanur Nagendra, Jatinder Sasan
Life of this patent
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Abstract
An electronic device manufacturing system that includes a process tool, an evaluation system, and a communication node. The communication node is configured to obtain one or more attributes from the evaluation system and identify a data collection plan that is based on the one or more attributes. The communication node is further configured to register with the process tool to receive data according to the data collection plan and receive, from the process tool, data according to the data collection plan. The communication node is further configured to send the received data to the evaluation system.
Claims20
An electronic device manufacturing system, comprising:
- a process tool;
- an evaluation system;
- and
- a communication node configured to:
- obtain one or more attributes from the evaluation system;
- identify a data collection plan that is based on the one or more attributes;
- register with the process tool to receive data according to the data collection plan;
- receive, from the process tool, data according to the data collection plan;
- and
- send the received data to the evaluation system.
A method, comprising:
- obtaining, by a processing device, one or more attributes from an evaluation system;
- identifying a data collection plan that is based on the one or more attributes;
- registering with a process tool to receive data according to the data collection plan;
- receiving, from the process tool, data according to the data collection plan;
- and
- sending the received data to the evaluation system.
A non-transitory computer-readable storage medium comprising instructions that, when executed by a processing device operatively coupled to a memory, performs operations comprising:
- obtaining one or more attributes from an evaluation system;
- identifying a data collection plan that is based on the one or more attributes;
- registering with a process tool to receive data according to the data collection plan;
- receiving, from the process tool, data according to the data collection plan;
- and
- sending the received data to the evaluation system.
Dependencies are inferred from the claim text.