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US 2024/0407075 A1Published application
Inverted plasma source
AssigneeMKS Instruments, Inc.
InventorsGordon HILL, Ron COLLINS
Life of this patent
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Abstract
A plasma source, comprising a plasma source body, comprising: a plurality of magnetic cores, a plurality of primary windings capable of being energized, and a cooling structure, wherein one or more sections of the plasma source body comprising a dielectric material, and wherein, when the plurality of primary windings are energized, a plasma forms around an outer portion of the plasma source body.
Claims19
A plasma source, comprising:
- a plasma source body, comprising:
- a plurality of magnetic cores;
- a plurality of primary windings capable of being energized;
- and
- a cooling structure;
- wherein one or more sections of said plasma source body comprising a dielectric material, and
- wherein, when said plurality of primary windings are energized, a plasma forms around an outer portion of said plasma source body.
4 more elements
A plasma source, comprising:
- a plasma source body formed from at least one plasma source body member and at least one dielectric break, the plasma source body defining at least one plasma source body passage therein;
- at least one ferrite core positioned within the plasma source body passage;
- at least one primary winding traversing at least a portion of the plasma source body, the primary winding positioned proximate to the ferrite core, the primary winding in communication with at least one source RF energy, wherein the application of RF energy to the primary winding results in the formation of a plasma proximate to an outer surface of the plasma source body;
- and
- at least one thermal management structure positioned within the plasma source body passage proximate to the ferrite core, the thermal management structure in fluid communication with at least one fluid source via at least one thermal management system inlet on the plasma source body.
2 more elements
Dependencies are inferred from the claim text.