Bulk acoustic resonator, acoustic filter, and electronic device
OwnerBenfeng ZHANG, Yulin HUANG +3inventors
InventorsBenfeng ZHANG, Yulin HUANG, Xinyi LI, Zongzhi GAO, Hangtian HOU
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OwnerBenfeng ZHANG, Yulin HUANG +3inventors
InventorsBenfeng ZHANG, Yulin HUANG, Xinyi LI, Zongzhi GAO, Hangtian HOU
Estimating the term…
Embodiments of this application provide a bulk acoustic resonator, an acoustic filter, and an electronic device, to improve performance of the acoustic filter. The bulk acoustic resonator includes a piezoelectric material layer, an interdigital transducer, and a dielectric layer. The interdigital transducer is disposed on the piezoelectric material layer. The interdigital transducer includes a first busbar and a second busbar that are disposed opposite to each other, a plurality of first electrodes, and a plurality of second electrodes. The plurality of first electrodes sequentially protrude from the first busbar to the second busbar along an extension direction of the first busbar. The plurality of second electrodes sequentially protrude from the second busbar to the first busbar along an extension direction of the second busbar. The plurality of first electrodes and the plurality of second electrodes are sequentially arranged in a staggered manner between the first busbar and the second busbar.
A bulk acoustic resonator, comprising:
An acoustic filter, comprising a plurality of cascaded bulk acoustic resonators, wherein the bulk acoustic resonator comprises:
Dependencies are inferred from the claim text.