Laser apparatus and method for controlling the linewidth of the emitted laser beam
AssigneesImec Vzw, Universiteit Gent
InventorGeert MORTHIER
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AssigneesImec Vzw, Universiteit Gent
InventorGeert MORTHIER
Estimating the term…
A laser apparatus is described herein which includes a laser diode for emitting a laser beam, configured for frequency modulation of the laser beam; a sensor unit configured to receive a first portion of the laser beam, and for measuring variations of the frequency of the first portion; and a phase shifter arranged in a path of a second portion of the laser beam, and configured to phase shift the second portion. The laser apparatus is configured to output the second portion having propagated through the phase shifter, and to acquire measurements of variations of the frequency during frequency modulation at different phase shifts, and to control the phase shifter based on the measurements to control the variations of the frequency, whereby the laser apparatus may control a linewidth of the laser beam in dependence of an external reflection of the output laser beam, received by the laser apparatus.
A laser apparatus comprising:
A method for controlling a linewidth of a laser beam emitted by a laser diode of a laser apparatus, the method comprising:
Dependencies are inferred from the claim text.