Gas laser device and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser device including:
• a chamber configured to enclose a laser gas as including a pair a of discharge electrodes having longitudinal direction oriented along a predetermined direction and facing each other with a space therebetween;
• a plurality of capacitors arranged along the predetermined direction, each of the capacitors having one terminal electrically connected to one of the discharge electrodes and the other terminal electrically connected to the other of the discharge electrodes;
• and
• a first magnetic switch and a second magnetic switch each electrically connected to the one discharge electrode and the one terminal of each of the capacitors and electrically connected to each other in parallel,
• the second magnetic switch being arranged closer to a center of the one discharge electrode in the predetermined direction than the first magnetic switch, and
• a Vt product of the first magnetic switch being smaller than a Vt product of the second magnetic switch.