Chamber for gas laser device, gas laser device, and electronic device manufacturing method

A gas laser device including a chamber having an internal space at which a laser gas is enclosed,

• the chamber including:
• a first main electrode and a second main electrode arranged with a longitudinal direction thereof being along a predetermined direction as being apart from and facing each other in the internal space;
• a window arranged at a wall surface of the chamber and configured to transmit light from the internal space;
• and
• a first preionization electrode arranged beside one side of the first main electrode,
• the first preionization electrode including a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along a longitudinal direction of the first dielectric pipe, and a first preionization outer electrode extending along the longitudinal direction of the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe, and
• at least a part of the first gap being larger than 0 mm and equal to or smaller than 0.9 mm.

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device including a chamber having an internal space at which a laser gas is enclosed;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device, the chamber including:
• a first main electrode and a second main electrode arranged with a longitudinal direction thereof being along a predetermined direction as being apart from and facing each other in the internal space;
• a window arranged at a wall surface of the chamber and configured to transmit light from the internal space;
• a first preionization electrode arranged beside one side of the first main electrode,
• the first preionization electrode including a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along a longitudinal direction of the first dielectric pipe, and a first preionization outer electrode extending along the longitudinal direction of the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe, and
• at least a part of the first gap being larger than 0 mm and equal to or smaller than 0.9 mm.