Light emitting diodes containing epitaxial light control features
AssigneeThe Regents of the University of California
InventorsSrinivas Gandrothula, Shuji Nakamura, Steven P. DenBaars
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Abstract
A method for fabricating epitaxial light control features, without reactive ion etching or wet etching, when active layers are included. The epitaxial light control features comprise light extraction or guiding structures integrated on an epitaxial layer of a light emitting device such as a light emitting diode. The light extraction or guiding structures are fabricated on the epitaxial layer using an epitaxial lateral overgrowth (ELO) technique. The epitaxial light control features can have many different shapes and can be fabricated with standard processing techniques, making them highly manufacturable at costs similar to standard processing techniques.
Claims16
A method, comprising:
- forming a growth restrict mask on a host substrate, wherein one or more patterns are formed on the growth restrict mask or the host substrate;
- and
- growing one or more epitaxial lateral overgrowth (ELO) layers and device layers on the host substrate using the growth restrict mask, wherein the patterns formed on the growth restrict mask or the host substrate are transferred to at least an interface between the ELO layers and the growth restrict mask, and the patterns comprise epitaxially integrated light control features to extract, guide, reflect, refract, focus or defocus light emitted from the device layers.
A structure, comprising:
- a growth restrict mask formed on a host substrate, wherein one or more patterns are formed on the growth restrict mask of the host substrate;
- and
- one or more epitaxial lateral overgrowth (ELO) layers and device layers grown on the host substrate using the growth restrict mask, wherein the patterns formed on the growth restrict mask or the host substrate are transferred to at least an interface between the ELO layers and the growth restrict mask, and the patterns comprise epitaxially integrated light control features to extract, guide, reflect, refract, focus or defocus light emitted from the device layers.
Dependencies are inferred from the claim text.