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US 2024/0405071 A1Published application
Stacked two-transistor dynamic random access memory cell
AssigneeInternational Business Machines Corporation
InventorsHeng Wu, Julien Frougier, Ruilong Xie, Min Gyu Sung, Chen Zhang
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Abstract
A semiconductor structure includes a nanosheet field-effect transistor having a nanosheet stack structure, and a fin field-effect transistor having a set of vertical fins. Each of the vertical fins includes an oxide semiconductor material. The nanosheet field-effect transistor and the fin field-effect transistor are in a stacked configuration.
Claims20
A semiconductor structure, comprising:
- a nanosheet field-effect transistor comprising a nanosheet stack structure;
- and
- a fin field-effect transistor comprising a set of vertical fins, wherein each of the vertical fins comprises an oxide semiconductor material;
- wherein the nanosheet field-effect transistor and the fin field-effect transistor are in a stacked configuration.
1 more element
An integrated circuit, comprising:
- one or more semiconductor structures, wherein at least one of the semiconductor structures comprises:
- a nanosheet field-effect transistor comprising a nanosheet stack structure;
- and
- a fin field-effect transistor comprising a set of vertical fins, wherein each of the vertical fins comprises an oxide semiconductor material;
- wherein the nanosheet field-effect transistor and the fin field-effect transistor are in a stacked configuration.
2 more elements
A semiconductor structure, comprising:
- a nanosheet field-effect transistor comprising a nanosheet stack structure and a first gate structure;
- and
- a fin field-effect transistor comprising:
- a set of vertical fins, wherein each of the vertical fins comprises an oxide semiconductor material;
- a second gate structure disposed on at least one vertical fin;
- a write word line disposed on the second gate structure;
- a write bit line disposed on the at least one vertical fin;
- and
- a metal contact connected to the first gate structure;
- wherein the nanosheet field-effect transistor and the fin field-effect transistor are in a stacked configuration.
7 more elements
Dependencies are inferred from the claim text.