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US 2024/0405018 A1Published application
Field-plated resistor
OwnerZachary K Lee, Wenyuan SUNinventors
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Abstract
A semiconductor device includes a semiconductor substrate. A well resistor is in the semiconductor substrate. A field plate is above the well resistor. An insulator is between the well resistor and the field plate. The well resistor includes a first terminal and a second terminal. The field plate may be coupled to the first terminal or the second terminal.
Claims20
A semiconductor device comprising:
- a semiconductor substrate;
- a well resistor in the semiconductor substrate;
- a field plate above the well resistor;
- and
- an insulator between the well resistor and the field plate.
2 more elements
An integrated circuit comprising:
- a resistor well extending into a semiconductor substrate;
- a dielectric layer extending into the resistor well;
- and
- a conductive field plate located over the dielectric layer, the conductive field plate configured to modulate a majority carrier distribution within the resistor well while the resistor well conducts a current.
1 more element
A method comprising:
- forming an insulation layer on a semiconductor substrate;
- doping a resistor well extending into the semiconductor substrate below the insulation layer;
- depositing a layer of a conductive material spaced apart from the resistor well by the insulation layer;
- and
- etching the conductive material to form a field plate over the resistor well.
2 more elements
Dependencies are inferred from the claim text.