Standing wafer holder

Abstract

Disclosed is a standing wafer holder comprising at least one base unit which comprises first and second wafer seats. The first wafer seat top is provided with a first arc-shaped concave surface, a first acting surface is formed on a side, facing the second wafer seat, of the first wafer seat and corresponds to an area where the first arc-shaped concave surface is located, and the first acting surface is shaped like a left half of Y. The second wafer seat top is provided with a second arc-shaped concave surface, a second acting surface is formed on a side, facing the first wafer seat, of the second wafer seat and corresponds to an area where the second arc-shaped concave surface is located, and the second acting surface is shaped like a right half of Y. The first and second acting surfaces work together to support a wafer vertically.

Dependencies are inferred from the claim text.