Receptor substrate, method for manufacturing receptor substrate, transfer method, method for manufacturing led panel, and stamper
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHiroshi Yamaoka, Masami Kurata, Taketo Usami, Yoshinori Ogawa, Kazunori Kondo
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a receptor substrate on which a plurality of objects to be transferred onto another substrate by using a stamper are disposed, and a method of manufacturing the same.
Claims12
1-24. (canceled)
A receptor substrate on which a plurality of objects to be transferred onto another substrate by using a stamper are disposed, the receptor substrate comprising:
- a plurality of sections in each of which a group of the objects to be transferred that are to be simultaneously transferred in a single transfer operation of the stamper are disposed;
- and
- a non-disposed region, in which the objects to be transferred are not disposed, at an outside of the section,
- wherein each of the plurality of sections is surrounded by the non-disposed region, and
- wherein a width of the non-disposed region sandwiched between two sections adjacent to each other in one adjacent direction among the plurality of section is greater than the distance between the objects to be transferred which are adjacent to each other in the adjacent direction in each of the two sections adjacent to each other, the width of the non-disposed region sandwiched between two sections adjacent each other being a width in the adjacent direction.
A method for manufacturing a receptor substrate on which a plurality of objects to be transferred onto another substrate by using a stamper are disposed, the method comprising:
- a step of providing a donor substrate including the objects to be transferred, and a receptor precursor substrate, and
- a step of obtaining a receptor substrate by transferring the objects to be transferred from the donor substrate onto the receptor precursor substrate by laser lift-off, wherein
- in the step of obtaining the receptor substrate, the objects to be transferred are transferred by the laser lift-off such that a plurality of sections in each of which a group of the objects to be transferred that are to be simultaneously transferred in a single transfer operation of the stamper disposed are formed, and a non-disposed region in which the objects to be transferred are not disposed is formed at an outside of the section, and each of the plurality of sections is surrounded by the non-disposed region on the receptor precursor substrate, and such that a width of the non-disposed region sandwiched between two sections adjacent to each other in one adjacent direction among the plurality of section is greater than the distance between the objects to be transferred which are adjacent to each other in the adjacent direction in each of the two sections adjacent to each other, the width of the non-disposed region sandwiched between two sections adjacent each other being a with in the adjacent direction.
Dependencies are inferred from the claim text.