Wet tool kit for forming semiconductor structure and cmos image sensor employing same

Abstract

A method of fabricating a semiconductor structure includes disposing a metal catalyst on a surface of a semiconductor. Thereafter, metal assisted chemical etching is performed, including holding the semiconductor immersed in an etchant solution and catalyzing an etching chemical reaction between the etchant solution and the semiconductor using the metal catalyst to etch the semiconductor to form a channel in the semiconductor. During at least a portion of the metal assisted chemical etching the semiconductor is held immersed in the etchant solution with a surface normal of the surface of the semiconductor at a non-zero angle respective to gravity. In some examples, an orientation of the semiconductor is changed during the metal assisted chemical etching to form the channel in the semiconductor with at least one bend or curved portion.

Dependencies are inferred from the claim text.