Support unit, support body, and ionization method
AssigneeHamamatsu Photonics K.K.
InventorsMasahiro KOTANI, Takayuki OHMURA
Life of this patent
Estimating the term…
Loading patent…
AssigneeHamamatsu Photonics K.K.
InventorsMasahiro KOTANI, Takayuki OHMURA
Estimating the term…
The support unit includes a first support body and a second support body. The first support body includes an ionization substrate. The second support body is disposed to face the first support body. The second support body includes a support substrate and an adhesive layer. A placement surface of the support substrate has a first region and a second region. The first region overlaps the measurement region when viewed in a Z-axis direction. The second region has conductivity and includes a region configured not to overlap the first support body when viewed in the Z-axis direction. The adhesive layer has a first portion and a second portion. The first portion is provided in the first region. The second portion has conductivity and electrically connects the second region and the conductive layer of the first support body.
1:
2:
3:
4:
5:
6:
7:
8:
9:
10:
11:
12:
13:
14: