Power delivery using microwave source

Abstract

In one embodiment, the present disclosure is directed to a system for controlling microwave power delivered to a distributed electrode to improve the uniformity of an electric field on the distributed electrode. The system includes an RF source circuit comprising at least one RF generator and multiple RF source circuit outputs, each RF source circuit output outputting an RF source signal having a frequency of at least 300 MHz. For each of the RF source circuit outputs, a solid-state impedance matching circuit is operably coupled to the RF source circuit output and configured to receive the RF source signal output by the RF source circuit output. For each of the matching circuits, a system output is operably coupled to the matching circuit and configured to output the RF source signal to a distributed electrode of the load.

Dependencies are inferred from the claim text.