Semiconductor processing apparatus

A semiconductor processing apparatus comprising:

• a sample chamber that includes a processing mechanism for processing a semiconductor wafer therein;
• a plurality of load lock chambers that carry the semiconductor wafer into the sample chamber;
• and
• a sample exchange mechanism that exchanges semiconductor wafers between the sample chamber and each of the plurality of load lock chambers, wherein
• the semiconductor processing apparatus includes a control mechanism that controls operations of mechanisms of the plurality of load lock chambers so that an operation of a mechanism accompanied by an operation that generates vibration is performed in a load lock chamber in which the semiconductor wafer is not exchanged among the plurality of load lock chambers at a timing when one of the plurality of load lock chambers is exchanging the semiconductor wafer with the sample chamber.