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US 2024/0404036 A1Published application
Detection apparatus for simultaneous acquisition of multiple diverse images of an object
AssigneeASML Netherlands B.V.
InventorsTeunis Willem TUKKER, Arie Jeffrey DEN BOEF, Nitesh PANDEY, Marinus Petrus REIJNDERS, Ferry ZIJP
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Abstract
Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
Claims20
A detection apparatus comprising:
- a geometric phase lens comprising a first focal length for a first polarization component of an incoming beam of unpolarized radiation and a second focal length for a second polarization component of the incoming beam of unpolarized radiation;
- and
- a detector operable to separately detect the first polarization component and the second polarization component to obtain a pair of images of a target.
A method comprising:
- illuminating a target with first radiation, wherein the first radiation is diffracted from the target to form second radiation;
- creating a first polarization component and a second polarization component of the second radiation using a geometric phase lens, wherein the geometric lens comprises a first focal length for a first polarization component of the second radiation and a second focal length for the second polarization component of the second radiation;
- and
- detecting the first polarization component and the second polarization component with a detector configured to separately detect the first polarization component and the second polarization component to obtain a pair of images.
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Dependencies are inferred from the claim text.