Error Factor Estimation Device, Error Factor Estimation Method, and Computer-Readable Medium

An error factor estimation method of estimating an error factor of an inspection result which becomes erroneous, the method comprising:

• processing data including the inspection result collected from an inspection device and generating a plurality of feature quantities,
• generating a first model for training a relationship between errors and the plurality of generated feature quantities;
• calculating a contribution degree indicating the degree of contribution of at least one of the plurality of feature quantities used for training for the first model to an output of the first model, and
• acquiring error factors labeled with feature quantities or combinations of the feature quantities selected based on the calculated contribution degree or usefulness calculated from the contribution degree.

A non-transitory computer-readable medium storing a program command for executing an error factor estimation method of estimating an error factor of an inspection result which becomes erroneous, wherein the error factor estimation method includes

• processing data including the inspection result collected from an inspection device and generating a plurality of feature quantities,
• generating a first model for training a relationship between errors and the plurality of generated feature quantities;
• calculating a contribution degree indicating the degree of contribution of at least one of the plurality of feature quantities used for training for the first model to an output of the first model, and
• acquiring error factors labeled with feature quantities or combinations of the feature quantities selected based on the calculated contribution degree or usefulness calculated from the contribution degree.