Device management system, indication maintenance system, device management method, and recording medium

An indication maintenance system includes:

• one or more semiconductor manufacturer servers;
• and
• a device management system, wherein
• the one or more semiconductor manufacturer servers each comprising:
• a memory storing instructions;
• and
• at least one processor configured to execute the instructions to:
• store a parameter relating to an operation status of a semiconductor manufacturing device;
• conceal a parameter stored;
• and
• transmit a parameter concealed to a device management system in a concealed form, and
• the device management system comprising:
• a memory storing instructions;
• and
• at least one processor configured to execute the instructions to:
• receive a parameter relating to an operation status of the semiconductor manufacturing device in a concealed form, wherein the parameter is used for analysis relating to indication maintenance of a semiconductor manufacturing device;
• analyze indication maintenance of components of a semiconductor manufacturing device by secure calculation using the received parameters in the concealed form;
• and
• output a result of indication maintenance of the analyzed component.

A device management method comprising:

• receiving, in a concealed form, a parameter used for analysis relating to indication maintenance of a semiconductor manufacturing device and relating to an operation status of the semiconductor manufacturing device;
• analyzing indication maintenance of components of the semiconductor manufacturing device by secure calculation using the received parameter in the concealed form;
• and
• outputting a result of indication maintenance of the analyzed component.

A non-transitory recording medium for storing a program causing a computer to execute:

• receiving, in a concealed form, a parameter used for analysis relating to indication maintenance of a semiconductor manufacturing device and relating to an operation status of the semiconductor manufacturing device;
• analyzing indication maintenance of components of a semiconductor manufacturing device by secure calculation using the received parameter in the concealed form;
• and
• outputting a result of indication maintenance of the analyzed component.